KBF/EM Electron Microscopy

Lecturer: Roman Kouřil
Lecture:  2 hours/week + tutorial 1 hour/week
Credits: 4
Winter semester
Form of course completion: exam

• Introduction to electron microscopy. Interaction of electrons with a solid matter, diffraction, elastic and non-elastic scattering, resolution, specimen radiation damage, amplitude and phase contrast, image formation.
• Construction of the transmission electron microscope, electron source, illumination system, lenses, apertures, lens aberrations, resolution, electron detection and display. Vacuum system, specimen holders, specimen preparation techniques.
• Operation of the electron microscope, microscope alignments, correction of astigmatism, alignment of apertures and electron beam, operation modes of the microscope. Basic principles of image processing and analysis.
• Electron microscopy analytical methods (EELS, EDX), scanning electron microscopy (SEM, STEM), scanning probe microscopy, cryo electron microscopy, electron tomography.